Bipolar Pulsed Dc Power Supply

Mks rpdg generators provide asymmetric bipolar and unipolar pulsed dc power for reactive pvd physical vapor deposition cvd chemical vapor deposition bias and enhancement coating applications.

Bipolar pulsed dc power supply.

The bipolar pulsed power supply is a modular designed system consisting of the dc power unit and the bipolar pulse unit which switches the voltage with a freely adjustable pulse of. Advanced waveform control allows process fine tuning. With the new cp20 248 the manufacturer from. Ac bipolar pulsed power supply for reactive magnetron sputtering article pdf available in ieee transactions on plasma science 39 10 1983 1989 november 2011 with 529 reads how we measure.

Dc power supplies for sputtering plants and ion sources pulse generators as one of the leading manufacturers of power supplies for thin film coating systems adl analoge und digitale leistungselektronik gmbh offers its customers innovative solutions for complex processes. The cp20 series from puls stands for efficient and compact 24v 20a 1 phase din rail power supplies. An asymmetric bipolar pulsed dc power supply and a dc power supply were used to sputter si and ti targets respectively in ar n2 plasma. Ascent ap series unprecedented power control for single and dual magnetron sputtering.

Bipolar pulsed power supplies model magpuls bp the bipolar pulsed power supplies model magpuls bp are constructed for plasma excitation with highest performance. Achieve new levels of process performance using field proven bipolar dc pulsing technology. The rpdg line eliminates yield limiting factors thus enabling existing pvd tools to produce the high quality low defect films needed for next. Available for both dual pulsed and single pulsed magnetron sputtering applications.

Structural characterization of the coatings was done. The power supply works as a voltage source negative pulse amplitude can be adjusted in the range of 20 to 200v dc the positive pulse amplitude is within the range of 15 to 50v dc and is proportional to the negative pulse current magnitude. Since the second half of 2006 we developed our own design of asymmetric bipolar pulsed bias power supply. The capacitor charging high voltage dc power supplies are designed specifically to the requirements of capacitor charging or capacitor conditioning i e.